The Design of ATE Calibration Equipment Based on Microelectric Reference Materials

Abstract

Microelectronic Reference Materials (RMs) are a good way to achieve microelectronic traceability. To achieve full calibration of Automated Test Equipment (ATE), each test channel should be traced to calibration equipment of ATE based on RMs. This paper puts forward a design solution of calibration equipment of ATE based on RMs, which can realize the versatility and portability of calibration equipment, and realize automatic calibration progress.