Application Status of MEMS Technology in Marine Field

Abstract

With the improvement of MEMS technology and the increasing demand for marine exploration, various types of sensors based on MEMS have been more widely used in observations of the ocean. This paper describes the application status of MEMS-based sensors in marine field, such as inertial sensors, underwater acoustic sensors and Conductivity-Temperature-Depth sensors. It also prospects the development trends and research hotspots of MEMS technology in marine field.