Structure Optimized of Uncooled Infrared Sensors

Abstract

The resistive bolometer based on VOx was studied in the paper. Modeling and simulation was done, and structure was optimized by comparing the different results in thermal and mechanical simulation with different structure and material properties. The improved structures have better thermal response capacity and the mechanical performance, and the absorption efficiency of heat flow has increased by about 18.1%, laid the foundation for the structure amelioration of the uncooled thermal detector.