Elliptical Microlens Fabrication by Spatially Shaped Femtosecond Laser-assisted Chemical Etching

Abstract

We proposed a promising method for fabricating elliptical microlens and microlens array with controlling morphology by slit-based spatially shaped femtosecond laser-assisted chemical etching on fused silica (SiO2). The major axis length and the ratio of major and minor axis were controlled by changing the slit width. The minor axis length was controlled by changing the energy. This method had good flexibility and high efficiency. The convex elliptical microlens and microlens array were also realized by mold replication.