The Composition Analysis and Prediction of Fe-Ga Alloy Films Deposited by Magnetron Sputtering

Abstract

In this paper, Fe-Ga alloy films were deposited via altering the area of pure-iron slices plastered on the target material using magnetron sputtering. A model was presented to analyze and predict the composition of Fe-Ga alloy films. The results demonstrated that the composition of alloy films can be predicted and controlled via adjusting the Fe slice area when depositing Fe-Ga alloy films. It was also found that sputtered films existed in crystalline form rather than amorphous state. Moreover, these crystals owned an unordered body-centered cubic crystal structure.