Development and Investigation of Three Different Topologies of Devices for Sensing of Moisture Traces

Abstract

This work evaluates the development and investigation of three different topologies devices for low moisture level sensing using small electrode systems interdigitated with capacitive properties. Such devices have a millimeter scale and have a simple constructive process. The different sensors developed and tested were submitted to a process with duration of 240 minutes, with intervals of temperature changes and alteration of the conditions of the environment in which they were exposed through the use of nitrogen gas without presence of any moisture (N2) and nitrogen gas with an amount of moisture (N2 with 300 ppmv H2O). This process was aimed at the analysis of changes in the capacitance values of these sensors as temperature and humidity levels changed.