A Model for Thermoelastic Damping in Microbeams of Rhombic Cross-section

Sujie Lu, Pu Li

Abstract


This paper purposes to study thermoelastic damping in microbeams of rhombic cross-section. Detailed formulas are derived, for the first time, for the TED of rhombic cross-section. An approximation method is used to solve the two-dimensional heat conduction equation. The temperature field will be further derived by using the simplified procedure. The present model is validated by comparison with the finite element method (FEM) model.

Keywords


MEMS, Microbeam, Thermoelastic damping, Rhombic cross-section

Publication Date


2016-12-21 00:00:00


DOI
10.12783/dtetr/ICMITE20162016/4563

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