Force Sensitivity and Stability of Multi-electrode Integrated Quartz Resonator

Abstract

A new multi-electrode quartz resonator and signal processing circuit is designed on the basis of analyzing the stress distribution in the wafer when the quartz wafer is subjected to force. When a plurality of resonators were simultaneously excited at room temperature and atmospheric conditions, the linearity of force-frequency characteristics and frequency stability on the resonators corresponding to the respective electrodes are excellent. After the interaction frequency difference and superposition processing to the frequency of each resonator, the force—frequency coefficient of the output frequency signal can reach 2951.8Hz/N, the linear correlation R is 0.9997, and the frequency stability can reach the magnitude of 10-10.