Development and Calibration of High Temperature Pressure Sensor

Miao-miao TAN

Abstract


High temperature pressure sensors are widely used in petrochemical, aerospace, metallurgy, gas machine. According to the mechanism, the recent research on high temperature pressure sensors is reviewed. The comparison and analysis about working temperature and sensitivity among different pressure sensors are completed. High temperature pressure calibration system has less research, reasonable system design and calibration method is needed to further studies.

Keywords


High temperature, Pressure sensor, Piezoresistive, Capacitance, Calibration


DOI
10.12783/dtcse/aita2016/7590

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