Development and Calibration of High Temperature Pressure Sensor
Abstract
High temperature pressure sensors are widely used in petrochemical, aerospace, metallurgy, gas machine. According to the mechanism, the recent research on high temperature pressure sensors is reviewed. The comparison and analysis about working temperature and sensitivity among different pressure sensors are completed. High temperature pressure calibration system has less research, reasonable system design and calibration method is needed to further studies.
Keywords
High temperature, Pressure sensor, Piezoresistive, Capacitance, Calibration
DOI
10.12783/dtcse/aita2016/7590
10.12783/dtcse/aita2016/7590
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