Preparation and Properties of Silicon Carbide Ceramic Film

Abstract

As the raw materials, the silicon carbide (SiC) and silicon nitride (Si3N4), were using to prepare the pure SiC ceramic membrane in the argon atmosphere with different addition of Si3N4 by atmospheric pressure sintering process. The microstructure, pore size distribution, morphology of crystal and phase of SiC membrane which influenced by different amount of Si3N4 have been discussed. Result shows the silicon carbide are the primary phase of membrane, With the increase of the addition of Si3N4, the pore diameter of the film increases gradually. The membrane withe 28.5% Si3N4 has the suitable diameter(2μm) and sintering degree