The Influence of the Negative Bias of TiAlN/ABS Film Composition
Abstract
By increasing the negative bias assisted sputter deposition in an unbalanced magnetron sputtering method for the preparation of TiAlN/ABS film for improving the wear resistance, the surface hardness and gloss of the polymer material. This article focuses on the impact of the substrate negative bias the composition of the film. The results: The film contains TiAlN, TiN, AlN chemical substance. With increasing of bias the content of these types of substances gradually increased. TiAlN film contains at most when the negative bias is 60V.
DOI
10.12783/dtmse/icmea2015/7292
10.12783/dtmse/icmea2015/7292
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